X-ray lithography beamline BLD-811 MAX-Lab, Lund University National Electron Accelerator Laboratory for Nuclear Physics and Synchrotron Radiation Research
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Beamline D811 utilizes broadband synchrotron radiation from a bending magnet. The beamline is used both for nanolithography, using 1-2 keV X-rays, and for deep X-ray lithography using 3-9 keV X-rays. The appropriate photon energy range is selected by using thin-film filters and a grazing incidence mirror. A scanner stage allows a homogeneous exposure of a 90 * 90 mm2 area. more>>		Serguei Peredkov, beamline manager phone: +46-(0)46-222-36-29 fax: +46-(0)46-222-47-10 e-mail: serguei.peredkov@sljus.lu.se Postal address: MAX-Lab , Lund University, Box 118, S-221 00 LUND, Sweden Visiting address: Ole Romers vag 1